Aluminium surface modification by nitrogen-argon mixture PIII

Aluminium surface modification by nitrogen-argon mixture PIII

Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 us pulse widths, the sample temperature being established at 400 °C. Incident fluencies of ~10(18) atoms/cm² were used to investigate the diffusion behaviour and AlN phase formation in the samples. X-ray diffraction (XRD) shows the formation of the cubic phase of AlN with both pure nitrogen and all the mixtures whereas the hexagonal phase becomes apparent only in the 50% mixture and in pure nitrogen. The characteristic peak of AlN has also been determined by Raman spectroscopy. The microhardness was found to be always maximal with the 50% nitrogen 50% argon mixture.

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Autores principales: Millán-Flores,H., López-Callejas,R., Granda-Gutiérrez,E. E., de la Piedad-Benítez,A., Muñóz-Castro,A. E., Valencia A.,R., Peña-Eguiluz,R., Mercado-Cabrera,A., Barocio,S. R.
Formato: Digital revista
Idioma:English
Publicado: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2009
Acceso en línea:http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S1665-35212009000200003
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spelling oai:scielo:S1665-352120090002000032013-11-28Aluminium surface modification by nitrogen-argon mixture PIIIMillán-Flores,H.López-Callejas,R.Granda-Gutiérrez,E. E.de la Piedad-Benítez,A.Muñóz-Castro,A. E.Valencia A.,R.Peña-Eguiluz,R.Mercado-Cabrera,A.Barocio,S. R. plasma immersion ion implantation X-ray diffraction hardness scanning electron microscopy surface modification Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 us pulse widths, the sample temperature being established at 400 °C. Incident fluencies of ~10(18) atoms/cm² were used to investigate the diffusion behaviour and AlN phase formation in the samples. X-ray diffraction (XRD) shows the formation of the cubic phase of AlN with both pure nitrogen and all the mixtures whereas the hexagonal phase becomes apparent only in the 50% mixture and in pure nitrogen. The characteristic peak of AlN has also been determined by Raman spectroscopy. The microhardness was found to be always maximal with the 50% nitrogen 50% argon mixture.info:eu-repo/semantics/openAccessSociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.Superficies y vacío v.22 n.2 20092009-06-01info:eu-repo/semantics/articletext/htmlhttp://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S1665-35212009000200003en
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country México
countrycode MX
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region America del Norte
libraryname SciELO
language English
format Digital
author Millán-Flores,H.
López-Callejas,R.
Granda-Gutiérrez,E. E.
de la Piedad-Benítez,A.
Muñóz-Castro,A. E.
Valencia A.,R.
Peña-Eguiluz,R.
Mercado-Cabrera,A.
Barocio,S. R.
spellingShingle Millán-Flores,H.
López-Callejas,R.
Granda-Gutiérrez,E. E.
de la Piedad-Benítez,A.
Muñóz-Castro,A. E.
Valencia A.,R.
Peña-Eguiluz,R.
Mercado-Cabrera,A.
Barocio,S. R.
Aluminium surface modification by nitrogen-argon mixture PIII
author_facet Millán-Flores,H.
López-Callejas,R.
Granda-Gutiérrez,E. E.
de la Piedad-Benítez,A.
Muñóz-Castro,A. E.
Valencia A.,R.
Peña-Eguiluz,R.
Mercado-Cabrera,A.
Barocio,S. R.
author_sort Millán-Flores,H.
title Aluminium surface modification by nitrogen-argon mixture PIII
title_short Aluminium surface modification by nitrogen-argon mixture PIII
title_full Aluminium surface modification by nitrogen-argon mixture PIII
title_fullStr Aluminium surface modification by nitrogen-argon mixture PIII
title_full_unstemmed Aluminium surface modification by nitrogen-argon mixture PIII
title_sort aluminium surface modification by nitrogen-argon mixture piii
description Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 us pulse widths, the sample temperature being established at 400 °C. Incident fluencies of ~10(18) atoms/cm² were used to investigate the diffusion behaviour and AlN phase formation in the samples. X-ray diffraction (XRD) shows the formation of the cubic phase of AlN with both pure nitrogen and all the mixtures whereas the hexagonal phase becomes apparent only in the 50% mixture and in pure nitrogen. The characteristic peak of AlN has also been determined by Raman spectroscopy. The microhardness was found to be always maximal with the 50% nitrogen 50% argon mixture.
publisher Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
publishDate 2009
url http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S1665-35212009000200003
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