Aluminium surface modification by nitrogen-argon mixture PIII

Pure nitrogen, 30% argon/70% nitrogen, 50% argon/50% nitrogen, 70% argon/30% nitrogen plasma immersion ion implantation (PIII) processes onto aluminium samples has been performed at 2 to 6 kV negative bias and 50 to 150 us pulse widths, the sample temperature being established at 400 °C. Incident fluencies of ~10(18) atoms/cm² were used to investigate the diffusion behaviour and AlN phase formation in the samples. X-ray diffraction (XRD) shows the formation of the cubic phase of AlN with both pure nitrogen and all the mixtures whereas the hexagonal phase becomes apparent only in the 50% mixture and in pure nitrogen. The characteristic peak of AlN has also been determined by Raman spectroscopy. The microhardness was found to be always maximal with the 50% nitrogen 50% argon mixture.

Bibliographic Details

Main Authors:	Millán-Flores,H., López-Callejas,R., Granda-Gutiérrez,E. E., de la Piedad-Benítez,A., Muñóz-Castro,A. E., Valencia A.,R., Peña-Eguiluz,R., Mercado-Cabrera,A., Barocio,S. R.
Format:	Digital revista
Language:	English
Published:	Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2009
Online Access:	http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S1665-35212009000200003
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