Design and characterization of an RF plasma cleaner
The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. The electron energy distribution function is determined with a standard RF-filtered electrostatic probe; it is found that the plasma is well described by a Druyvesteyn energy distribution function.
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| Principais autores: | , , , |
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| Formato: | Digital revista |
| Idioma: | English |
| Publicado em: |
Sociedade Brasileira de Física
2010
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| Acesso em linha: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332010000100015 |
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