APA (7th ed.) Citation

Pauleau, Y. e., & service), S. (. (2002). Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies [electronic resource]. Dordrecht : Springer Netherlands : Imprint: Springer.

Chicago Style (17th ed.) Citation

Pauleau, Yves. editor., and SpringerLink (Online service). Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies [electronic Resource]. Dordrecht : Springer Netherlands : Imprint: Springer, 2002.

MLA (8th ed.) Citation

Pauleau, Yves. editor., and SpringerLink (Online service). Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies [electronic Resource]. Dordrecht : Springer Netherlands : Imprint: Springer, 2002.

IICA/CATIE Citation

Pauleau, Y. e., ; service), S. (. 2002. Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies [electronic resource]. Dordrecht : Springer Netherlands : Imprint: Springer.